Thermally Tripped Mems Circuit Breakers
نویسندگان
چکیده
The use of MEMS electrical switches as miniature electrically resettable circuit breakers is described. A prototype based on nickel thermal actuators on silicon has been fabricated and tested, and the performance is compared to analytical models. Trip currents of ≈ 300 mA are obtained, with trip times less than 50 ms. Temperature dependence of trip current is shown to be below 0.2%/K. The relation between achievable performance and physical device parameters is discussed.
منابع مشابه
Design and performance analysis of thermally actuated MEMS circuit breakers
The use of MEMS electrical switches as miniature electrically resettable circuit breakers is described. A prototype based on nickel thermal actuators on silicon has been fabricated and tested, and thermo-mechanical analysis is presented showing the relation between design parameters and performance. Temperature dependence of trip current is shown to be below 0.2% K−1, and analysis is presented ...
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